File:EUV dose to print contacts.png

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EUV_dose_to_print_contacts.png (481 × 288 pixels, file size: 10 KB, MIME type: image/png)

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Summary

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Description
English: Dose to print different size contacts with EUV. Source: Y. Borodovsky, EUV Lithography at Insertion and Beyond, 2012 International Workshop on EUV Lithography.
Date

2014/11/10

(2014-11-10 (first version); 2014-11-12 (last version))
Source Excel plot
Author Guiding light

Licensing

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Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2014-11-12 13:55 481×288× (10245 bytes) Guiding light '2' changed to subscript in y-axis label
2014-11-10 15:54 480×288× (7407 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

File history

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Date/TimeThumbnailDimensionsUserComment
current06:00, 13 March 2016Thumbnail for version as of 06:00, 13 March 2016481 × 288 (10 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
06:00, 13 March 2016Thumbnail for version as of 06:00, 13 March 2016480 × 288 (7 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-11-10 15:54:58 by Guiding light
10:11, 28 February 2016Thumbnail for version as of 10:11, 28 February 2016481 × 288 (10 KB)FastilyClone (talk | contribs)Transferred from enwp

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