File:CHARACTERIZATION AND FABRICATION OF THIN FILM PZT LAYER FOR DIRECTION FINDING MEMS SENSORS (IA characterization1094564077).pdf
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CHARACTERIZATION AND FABRICATION OF THIN FILM PZT LAYER FOR DIRECTION FINDING MEMS SENSORS
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| Author |
Stiker, Christian |
| Title |
CHARACTERIZATION AND FABRICATION OF THIN FILM PZT LAYER FOR DIRECTION FINDING MEMS SENSORS |
| Publisher |
Monterey, CA; Naval Postgraduate School |
| Description |
The Sensor Research Laboratory at the Naval Postgraduate School has developed a MEMS direction finding sensor that makes use of capacitance comb fingers in order to detect and localize frequencies near 1.4 kHz. The capacitance comb fingers have proven brittle and are prone to breaking when subjected to viscous, non-uniform environments or large sound pressure levels. Lead Zirconate Titanite, abbreviated to PZT, is a robust and durable piezoelectric ceramic used for sensing in many MEMs devices. This thesis will investigate whether it is possible to characterize and develop a usable PZT thin film for the eventual replacement of the capacitance comb fingers in the DF sensor. Subjects: PZT; MEMs; microfabrication; sol gel; acoustic sensing |
| Language | English |
| Publication date | December 2019 |
| Current location |
IA Collections: navalpostgraduateschoollibrary; fedlink |
| Accession number |
characterization1094564077 |
| Source | |
| Permission (Reusing this file) |
This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States. |
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This work is in the public domain in the United States because it is a work prepared by an officer or employee of the United States Government as part of that person’s official duties under the terms of Title 17, Chapter 1, Section 105 of the US Code.
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| This file has been identified as being free of known restrictions under copyright law, including all related and neighboring rights. | ||
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| current | 14:57, 15 July 2020 |  | 1,275 × 1,650, 104 pages (6.15 MB) | Fæ (talk | contribs) | FEDLINK - United States Federal Collection characterization1094564077 (User talk:Fæ/IA books#Fork8) (batch 1993-2020 #11216) |
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