File:8 nm hp EUV polarization.PNG

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8_nm_hp_EUV_polarization.PNG(621 × 408 pixels, file size: 15 KB, MIME type: image/png)

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Description
English: This coherent two-beam interference image formed by 13.5 nm EUV light at 8 nm half-pitch is critically dependent on polarization state. For the natural unpolarized state, there is already significant loss of contrast compared to the ideal, TE-polarized state. For the naturally assumed 50% average pattern density, the effective flare level (due to the lowered contrast from the TM component) for the unpolarized case is 18%.[1]

References

  1. J. Cobb et al., "Flare compensation in EUV Lithography," 2003 EUV Symposium, Antwerp.
Date 15 March 2010 (original upload date)
Source Transferred from en.wikipedia to Commons.
Author Guiding light at English Wikipedia

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Original upload log[edit]

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2010-03-15 08:22 621×408× (15825 bytes) Guiding light The image formed by 13.5 nm EUV light at 8 nm half-pitch is critically dependent on polarization state. For the natural unpolarized state, there is already significant loss of contrast compared to the ideal, TE-polarized state.

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Date/TimeThumbnailDimensionsUserComment
current10:08, 28 February 2016Thumbnail for version as of 10:08, 28 February 2016621 × 408 (15 KB)FastilyClone (talk | contribs)Transferred from enwp

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