File:16 nm pattern shift with EUV SMO.png
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Summary[edit]
| Description |
English: A metal layer targeting 16 nm CD patterned with EUV SMO single exposure is able to have a 100 nm CD 200 nm pitch overlay mark more in line with the 16 nm half-pitch metal lines, but not every feature in the same layer is easily captured within +/-1 nm shift over +/- 40 nm focus window. Ref.: W. Gillijns et al., Proc. SPIE vol. 10143, 1014314 (2017). |
| Date | |
| Source | Own work |
| Author | Guiding light |
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log[edit]
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| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-07-10 13:38 | 515×267× (9796 bytes) | Guiding light | |
| 2017-07-10 11:37 | 514×267× (9149 bytes) | Guiding light | |
| 2017-05-27 01:04 | 515×267× (9696 bytes) | Guiding light | |
| 2017-05-27 01:00 | 515×266× (8970 bytes) | Guiding light | |
| 2017-05-27 00:47 | 514×268× (10753 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 21:10, 15 December 2018 | | 515 × 267 (10 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 21:10, 15 December 2018 |  | 514 × 267 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-10 11:37:48 by Guiding light | |
| 21:10, 15 December 2018 |  | 515 × 267 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-27 01:04:28 by Guiding light | |
| 21:10, 15 December 2018 |  | 515 × 266 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-27 01:00:59 by Guiding light | |
| 21:10, 15 December 2018 |  | 514 × 268 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-27 00:47:47 by Guiding light | |
| 19:39, 15 December 2018 |  | 515 × 267 (10 KB) | KAP03 (talk | contribs) | Transferred from en.wikipedia via #commonshelper |
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