File:Triple complementary exposure.png
Jump to navigation
Jump to search
Size of this preview: 800 × 318 pixels. Other resolutions: 320 × 127 pixels | 1,106 × 439 pixels.
Original file (1,106 × 439 pixels, file size: 31 KB, MIME type: image/png)
Captions
Captions
Add a one-line explanation of what this file represents
Summary[edit]
| Description |
English: 3 complementary exposures to achieve 8 cuts saves 5 masks. Far left: 8 cuts for 9-12 nm half-pitch quadruple patterning. Middle left: First exposure covers the whole area of cuts. Middle right: Second exposure of opposite polarity keeps the lines except for most of the cuts. Far right: Third exposure of first polarity defines the remaining cuts. Ref.: F. T. Chen et al., Proc. SPIE vol. 8326, 83262L (2012). |
| Date |
2015-07-06 |
| Source | PowerPoint drawing |
| Author | Guiding light |
Licensing[edit]
Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log[edit]
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-07-10 10:56 | 1106×439× (32228 bytes) | Guiding light | Changed 'block' to 'keep' for more clear functional description. |
| 2015-07-08 13:18 | 1106×439× (32265 bytes) | Guiding light | More accurate block pattern edges |
| 2015-07-06 10:56 | 1106×439× (31513 bytes) | Guiding light | Drawing correction |
| 2015-07-06 10:48 | 1106×439× (31340 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:18, 13 March 2016 | | 1,106 × 439 (31 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 06:18, 13 March 2016 |  | 1,106 × 439 (32 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-08 13:18:35 by Guiding light | |
| 06:18, 13 March 2016 |  | 1,106 × 439 (31 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-06 10:56:48 by Guiding light | |
| 06:18, 13 March 2016 |  | 1,106 × 439 (31 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-06 10:48:17 by Guiding light | |
| 10:16, 28 February 2016 |  | 1,106 × 439 (31 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
You cannot overwrite this file.
File usage on Commons
There are no pages that use this file.
