File:SEM images of a fabricated tuning fork gyroscope.png

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Description
English: SEM images of a fabricated tuning fork gyroscope: (a) TFG chip, (b) close-up of the self-rotation ring, and (c) sensing comb electrodes.
Date
Source "Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping", Micromachines 2017, 8(2), 42; doi:10.3390/mi8020042 (Fig. 5)
Author Minh Ngoc Nguyen et al.

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current13:27, 19 November 2017Thumbnail for version as of 13:27, 19 November 20173,342 × 870 (567 KB)Geek3 (talk | contribs)gamma value fix
13:09, 19 November 2017Thumbnail for version as of 13:09, 19 November 20173,342 × 870 (497 KB)Geek3 (talk | contribs)User created page with UploadWizard

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