File:Rotated EUV illumination through slit.png
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DescriptionRotated EUV illumination through slit.png |
English: The EUV reticle illumination angles are rotated at different slit positions due to the arc-shaped slit used in EUV lithography tools, necessary for feasible image field corrections.[1][2][3][4][5][6][7][8][9][10] The reason for this is a mirror is used to transform straight rectangular fields into ring (arc-shaped) fields.[11] This is due to the off-vertical position of the point source (left),[12][13] which is actually a pupil position reflecting an arc-shaped image, such as light from an arc-shaped facet,[14][15] or other arc-shaped source (diverging beamlet).[16] In general,
light reflecting from a curved optical surface (such as the condenser) produces arc shapes.[17] Consequently, the angle-dependent and wavelength-dependent mask multilayer reflectance manifests as an effective illumination nonuniformity (shown here as the color gradient) across the pupil (right).[18] |
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This presentation was created with Microsoft PowerPoint. |
Author | Guiding light |
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- ↑ D. Hellweg et al., Proc. SPIE 7969, 79690H (2011).
- ↑ A. V. Pret et al., Proc. SPIE 10583, 105830K (2018).
- ↑ R. Capelli et al., Proc. SPIE 10957, 109570X (2019).
- ↑ S-H. Jang and S-H. Lee, US Patent 9715170 (Samsung).
- ↑ a b K. Hooker et al., Proc. SPIE 10446, 1044604 (2017).
- ↑ R. Capelli et al., Proc. SPIE 9231, 923109 (2014).
- ↑ C-H. Chang et al., US Patent 9091930 (TSMC).
- ↑ A. Garetto et al., J. Micro/Nanolith. MEMS MOEMS 13, 043006 (2014).
- ↑ W-H. Choi and N-Y. Chung, US Patent Application 20190163048 (Samsung).
- ↑ M. Antoni et al., Proc. SPIE 4146, 25 (2000).
- ↑ S. Koo et al., Proc. SPIE 7969, 79691N (2011).
- ↑ Carl Zeiss 2018
- ↑ a b E. van Setten et al., Proc. SPIE 10450, 104500W (2017).
- ↑ H. Komatsuda, Proc. SPIE 3997, 765 (2000).
- ↑ Q. Mei et al., Proc. 8679, 867923 (2013).
- ↑ W. C. Sweatt, OSA 1994.
- ↑ H. N. Chapman and K. A. Nugent, Proc. SPIE 3767, 225 (1999).
- ↑ N. Davydova et al., Proc. SPIE 8661, 866124 (2011).
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
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Original upload log[edit]
The original description page was here. All following user names refer to en.wikipedia.
Date/Time | Dimensions | User | Comment |
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2019-08-17 01:56:28 | 1147 × 550 | Guiding light | |
2019-08-16 12:58:52 | 1147 × 550 | Guiding light | |
2019-08-16 08:27:45 | 893 × 372 | Guiding light | |
2019-08-15 21:38:44 | 1028 × 548 | Guiding light | |
2019-08-15 12:22:15 | 1094 × 548 | Guiding light | |
2019-08-13 18:56:31 | 1218 × 498 | Guiding light | used actual reflectance map across pupil |
2019-07-20 06:34:27 | 1202 × 492 | Guiding light | Reverted to version as of 21:59, 3 July 2019 (UTC) |
2019-07-07 22:37:13 | 1270 × 561 | Guiding light | |
2019-07-07 17:06:51 | 1262 × 561 | Guiding light | |
2019-07-07 12:51:28 | 1250 × 558 | Guiding light | |
2019-07-03 21:59:14 | 1202 × 492 | Guiding light | |
2019-07-03 14:56:46 | 1203 × 498 | Guiding light | Changed illumination shape to annular with graded reflectance |
2019-06-29 09:06:39 | 1235 × 498 | Guiding light | |
2019-06-29 08:59:12 | 1235 × 498 | Guiding light | |
2019-06-29 04:21:42 | 1235 × 498 | Guiding light | |
2019-06-29 02:11:54 | 1208 × 500 | Guiding light | Added point source perspective |
2019-06-08 06:13:03 | 802 × 490 | Guiding light | |
2019-06-08 06:06:18 | 802 × 490 | Guiding light | |
2019-06-08 00:34:35 | 829 × 490 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 21:18, 20 August 2019 | 1,147 × 550 (43 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival | |
21:18, 20 August 2019 | 1,147 × 550 (44 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-08-16 12:58:52 by Guiding light | ||
21:18, 20 August 2019 | 893 × 372 (42 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-08-16 08:27:45 by Guiding light | ||
21:18, 20 August 2019 | 1,028 × 548 (41 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-08-15 21:38:44 by Guiding light | ||
21:18, 20 August 2019 | 1,094 × 548 (49 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-08-15 12:22:15 by Guiding light | ||
21:18, 20 August 2019 | 1,218 × 498 (50 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-08-13 18:56:31 by Guiding light | ||
21:18, 20 August 2019 | 1,270 × 561 (95 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-07-07 22:37:13 by Guiding light | ||
21:18, 20 August 2019 | 1,262 × 561 (95 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-07-07 17:06:51 by Guiding light | ||
21:18, 20 August 2019 | 1,250 × 558 (92 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-07-07 12:51:28 by Guiding light | ||
21:18, 20 August 2019 | 1,202 × 492 (58 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2019-07-03 21:59:14 by Guiding light |
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