File:Illustration of some saturation-determining factors in ALD.png

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Illustration of different saturation-determining factors in atomic layer deposition (ALD): running out of reactive sites, steric hindrance, and a combination of the two

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Description
English: Illustration of different saturation-determining factors in ALD: (a) running out of reactive sites causes saturation; (b) steric hindrance causes saturation in ligand exchange reaction with one ||Z–a group, with reactive sites ||Z–a capable of ligand exchange remaining under the ligand shroud; and (c) combination of running out of reactive sites of type ||Z–a and steric hindrance, for a reactant able to react (i) via ligand exchange with one ||Z–a group and (ii) dissociative adsorption onto ||M–Z|| sites.
Date
Source Own work
Author Riikka L. Puurunen, J. Ruud van Ommen

This image is an updated version of an earlier representation of factors identified to cause saturation of irreversible chemisorption, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 12; https://doi.org/10.1063/1.1940727.

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