File:EUV dipole relative pattern shift vs. focus.png

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EUV_dipole_relative_pattern_shift_vs._focus.png ‎(480 × 289 pixels, file size: 28 KB, MIME type: image/png)

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English: The pattern shift vs. focus is a nontrivial, non-monotonic function of pitch. While the smaller pitch has a more serious shift, intermediate pitches can have a larger shift than the smaller pitches (see inset). The telecentricity error in mrad gives the slope of relative pattern shift vs. focus window. Ref.: V. Philipsen et al., Proc. SPIE vol. 9325, 93250J (2014).
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This diagram was created with Microsoft Excel.
Author Guiding light

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2017-05-20 15:44:49 480 × 289 Guiding light
2017-05-20 15:44:18 480 × 289 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current21:33, 20 August 2019Thumbnail for version as of 21:33, 20 August 2019480 × 289 (28 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
21:32, 20 August 2019Thumbnail for version as of 21:32, 20 August 2019480 × 289 (13 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-20 15:44:18 by Guiding light
16:31, 20 August 2019Thumbnail for version as of 16:31, 20 August 2019480 × 289 (28 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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