File:DSA Multiple Patterning.png
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Summary[edit]
| Description |
English: Shows example of using only directed self-assembly steps to simplify multiple patterning. References:Synopsis Presentation at Semicon West 2013; M. C. Smayling et al., Proc. SPIE 8683, 868305 (2013); Z. Xiao et al., Proc. SPIE 8880, 888017-3 (2013). |
| Date |
2015-03-05 |
| Source | Excel drawing |
| Author | Guiding light |
Licensing[edit]
Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log[edit]
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-03-12 08:58 | 375×484× (10609 bytes) | Guiding light | label change |
| 2015-03-12 07:37 | 363×484× (10497 bytes) | Guiding light | Re-drawing |
| 2015-03-11 23:26 | 517×1103× (25789 bytes) | Guiding light | correction |
| 2015-03-11 23:24 | 517×1103× (25908 bytes) | Guiding light | |
| 2015-03-11 23:21 | 517×1074× (25846 bytes) | Guiding light | Third patterning step after two DSA steps |
| 2015-03-11 23:11 | 517×697× (16684 bytes) | Guiding light | |
| 2015-03-11 14:27 | 517×697× (6249 bytes) | Guiding light | |
| 2015-03-11 14:25 | 517×697× (16639 bytes) | Guiding light | Better picture |
| 2015-03-10 12:29 | 517×697× (16650 bytes) | Guiding light | corrected drawing |
| 2015-03-10 12:11 | 517×755× (17722 bytes) | Guiding light | redrawn pictures |
| 2015-03-10 12:07 | 517×755× (17708 bytes) | Guiding light | |
| 2015-03-10 06:22 | 334×548× (10682 bytes) | Guiding light | Only two DSA steps |
| 2015-03-05 04:17 | 334×820× (16263 bytes) | Guiding light | Colored guiding features |
| 2015-03-05 02:00 | 334×820× (17210 bytes) | Guiding light | Different font |
| 2015-03-05 01:49 | 334×820× (16953 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:00, 13 March 2016 | | 375 × 484 (10 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 06:00, 13 March 2016 |  | 363 × 484 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-12 07:37:44 by Guiding light | |
| 06:00, 13 March 2016 |  | 517 × 1,103 (25 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-11 23:26:48 by Guiding light | |
| 06:00, 13 March 2016 |  | 517 × 1,103 (25 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-11 23:24:58 by Guiding light | |
| 06:00, 13 March 2016 |  | 334 × 820 (17 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival | |
| 06:00, 13 March 2016 |  | 375 × 484 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-12 08:58:03 by Guiding light | |
| 06:00, 13 March 2016 |  | 517 × 1,074 (25 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-11 23:21:45 by Guiding light | |
| 06:00, 13 March 2016 |  | 363 × 484 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-12 07:37:44 by Guiding light | |
| 06:00, 13 March 2016 |  | 517 × 697 (16 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-11 23:11:24 by Guiding light | |
| 06:00, 13 March 2016 |  | 517 × 1,103 (25 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-03-11 23:26:48 by Guiding light |
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