File:Atomic layer deposition - schematic cycle DE.svg

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English: Schematic presentation of the first cycle of an atomic layer deposition (two components).
Deutsch: Schema der des ersten Zyklus einer Atomlagenabscheidung (zwei Komponenten,nicht idealisierte Darstellung)


1. Mit dem Substrat reagierter Reaktant A
2. Physisorbierter Reaktant A auf abgeschiedener Schicht
3. Nicht beschichteter Bereich (z.B. aufgrund sterischer Hinderung)
4. Nicht beschichteter Bereich, entstanden durch Desorption im Spülzyklus
5. Zielmaterial nach der Reaktion von Reaktant B mit der Precursorschicht von Reaktant A


6. Nicht reagierter Ligand von Reaktant A nach einem Zyklus
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Author Cepheiden
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Date/TimeThumbnailDimensionsUserComment
current11:14, 15 March 2009Thumbnail for version as of 11:14, 15 March 2009400 × 600 (342 KB)Cepheiden (talk | contribs)fix; some additions
11:01, 15 March 2009Thumbnail for version as of 11:01, 15 March 2009400 × 600 (323 KB)Cepheiden (talk | contribs)small correction in SVG Syntax
10:58, 15 March 2009Thumbnail for version as of 10:58, 15 March 2009400 × 600 (323 KB)Cepheiden (talk | contribs){{Information |Description={{en|1=Schematic presentation of the first cycle of an atomic layer deposition (two components). }} {{de|1=Schema der des ersten Zyklus einer Atomlagenabscheidung (zwei Komponenten,nicht idealisierte Darstellung) }} |Source=Eige

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