File:3-color SAQP.png
3-color_SAQP.png (373 × 277 pixels, file size: 5 KB, MIME type: image/png)
Captions
Captions
Summary[edit]
| Description |
Self-aligned quadruple patterning (SAQP) allows mask feature density to be multiplied 16x. The key factor is the use of spacers to effectively halve the feature pitch; this is applied twice to quarter the pitch. Coloring is key to distinguish which features were from the original mask. Here the blue or red feature may be assigned to the mask. The red or blue feature would then be the respective secondary pattern from the first spacer application. The green feature is the tertiary pattern from the second spacer application. * US Patent 8697538.
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| Date | |
| Source | Excel drawing |
| Author | Guiding light |
Licensing[edit]
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log[edit]
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2016-10-09 10:43:41 | 373× 277× | Guiding light | aspect ratio adjustment in part of figure |
| 2016-10-09 10:38:22 | 360× 277× | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:37, 26 December 2016 | | 373 × 277 (5 KB) | FastilyClone (talk | contribs) | Transferred from en.wikipedia (MTC!) |
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