File:Unpolarized EUV linewidth vs pitch.PNG
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Summary
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| Description |
English: Impact of polarization in 2-beam interference for different pitches at 10 nm targeted linewidth. The ideal polarization is TE-polarized, as commonly used in 193 nm immersion (ArFi) lithography. As half-pitch (hp) decreases, destructive interference of unpolarized EUV light becomes less effective, due to the presence of the TM-polarized light. This increases the linewidth sensitivity to dose errors. As the lithographic process threshold drops below the target dose, the linewidth is reduced faster for the unpolarized case. This effect is more severe as the pitch is reduced, due to the larger interference angle.
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| Date | 25 January 2012 (original upload date) |
| Source | Transferred from en.wikipedia to Commons. |
| Author | Guiding light at English Wikipedia |
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Attribution: Guiding light at English Wikipedia
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2012-01-29 14:02 | 850×523× (23542 bytes) | Guiding light | corrected axis labels |
| 2012-01-29 13:16 | 850×523× (25173 bytes) | Guiding light | comparison of 10 nm vs. 20 nm hp |
| 2012-01-29 13:00 | 850×523× (22842 bytes) | Guiding light | re-focus on 10 nm target linewidth |
| 2012-01-29 09:15 | 783×412× (17908 bytes) | Guiding light | "TE" in curve label replaced by "TE-polarized" |
| 2012-01-29 09:10 | 783×412× (17909 bytes) | Guiding light | focus on 16 nm linewidth, simpler presentation using fewer curves |
| 2012-01-26 03:03 | 814×481× (27556 bytes) | Guiding light | axis label changes |
| 2012-01-25 07:18 | 814×481× (27308 bytes) | Guiding light | x-axis label; graph title font |
| 2012-01-25 05:23 | 814×481× (26797 bytes) | Guiding light | Impact of polarization interference on unpolarized EUV image for different. The ideal polarization is TE-polarized, as commonly used in 193 nm immersion (ArFi) lithography. |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:19, 13 March 2016 | | 850 × 523 (23 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 06:18, 13 March 2016 |  | 850 × 523 (25 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-01-29 13:16:10 by Guiding light | |
| 06:18, 13 March 2016 |  | 850 × 523 (22 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-01-29 13:00:32 by Guiding light | |
| 06:18, 13 March 2016 |  | 783 × 412 (17 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-01-29 09:15:09 by Guiding light | |
| 06:18, 13 March 2016 |  | 783 × 412 (17 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-01-29 09:10:06 by Guiding light | |
| 06:18, 13 March 2016 |  | 814 × 481 (27 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-01-26 03:03:16 by Guiding light | |
| 06:18, 13 March 2016 |  | 814 × 481 (27 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-01-25 07:18:33 by Guiding light | |
| 06:18, 13 March 2016 |  | 814 × 481 (26 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-01-25 05:23:17 by Guiding light | |
| 10:08, 28 February 2016 |  | 850 × 523 (23 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
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