File:Spectrum of lithography lights.PNG
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| Description |
English: Spectrum of lithography lights |
| Date | |
| Source | Made by uploader (ref:[1], [2], [3], 麻蒔立男著、『超微細加工の本』、日刊工業新聞社、2004年1月30日初版1刷発行、ISBN 4526052264, 菊地正典著、『半導体製造装置』、日本実業出版社、2007年4月20日初版発行、ISBN 9784534042170, 菊池正典著、『やさしくわかる半導体』、日本実業出版社、2000年6月30日初版発行、ISBN 4534030975) |
| Author | Shigeru23 |
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I, the copyright holder of this work, hereby publish it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 18:45, 16 June 2011 | | 1,150 × 350 (104 KB) | Shigeru23 (talk | contribs) | {{Information |Description ={{en|1=Spectrum of lithography lights}} |Source =Made by uploader (ref:[http://web.canon.jp/technology/approach/mcat/suzuki.html], [http://web.canon.jp/technology/canon_tech/category/step.html], [http://www.nikon.co. |
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