File:Pupil map of defocus phase.png

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Pupil_map_of_defocus_phase.png (399 × 396 pixels, file size: 44 KB, MIME type: image/png)

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Summary

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Description With defocus, different illumination points of the pupil will have different phase differences between 0th and 1st diffraction orders, represented here as different colors. Reference: https://www.linkedin.com/pulse/stochastic-impact-defocus-euv-lithography-frederick-chen
Date
Source Excel,PowerPoint
Author Guiding light

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2020-07-12 05:58:11 389 × 383 Guiding light Redrawn for better visual
2020-07-01 02:35:18 399 × 396 Guiding light
2020-06-25 13:05:51 416 × 398 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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File history

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Date/TimeThumbnailDimensionsUserComment
current01:00, 13 August 2020Thumbnail for version as of 01:00, 13 August 2020399 × 396 (44 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2020-07-01 02:35:18 by Guiding light
01:00, 13 August 2020Thumbnail for version as of 01:00, 13 August 2020416 × 398 (63 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2020-06-25 13:05:51 by Guiding light
20:23, 11 August 2020Thumbnail for version as of 20:23, 11 August 2020389 × 383 (16 KB)MrTransfer (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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