File:Pupil map defocus phase.png

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Pupil_map_defocus_phase.png (389 × 383 pixels, file size: 16 KB, MIME type: image/png)

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Summary

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Description With defocus, different illumination points of the pupil will have different phase differences between 0th and 1st diffraction orders, represented here as different colors. The zero phase difference is within the green zone. Ref.: The Stochastic Impact of Defocus in EUV Lithography
Date
Source Power Point
Author Guiding light


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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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The original description page was here. All following user names refer to en.wikipedia.
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2020-07-12 06:17:02 389 × 383 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current20:24, 11 August 2020Thumbnail for version as of 20:24, 11 August 2020389 × 383 (16 KB)MrTransfer (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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