File:PFR loss of productivity at smaller pitch.png
From Wikimedia Commons, the free media repository
Jump to navigation
Jump to search
PFR_loss_of_productivity_at_smaller_pitch.png (480 × 288 pixels, file size: 9 KB, MIME type: image/png)
File information
Structured data
Captions
This image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with
{{vector version available|new image name}} .
It is recommended to name the SVG file “PFR loss of productivity at smaller pitch.svg”—then the template Vector version available (or Vva) does not need the new image name parameter. |
Summary
[edit]DescriptionPFR loss of productivity at smaller pitch.png |
English: As pitch decreases, it becomes more necessary to use half-leaf and even quarter-leaf portions of dipole illumination to address EUV 3D mask effects.[1] This results in pupil fill ratio decreasing rapidly as pitch decreases. Below 20% of the pupil, the throughput and dose stability begin to suffer, with the required dose being inversely proportional to the pupil fill.[2] |
Date | |
Source | Own work |
Author | Guiding light |
Licensing
[edit]I, the copyright holder of this work, hereby publish it under the following license:
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
This media file is uncategorized.
Please help improve this media file by adding it to one or more categories, so it may be associated with related media files (how?), and so that it can be more easily found.
Please notify the uploader with {{subst:Please link images|File:PFR loss of productivity at smaller pitch.png}} ~~~~ |
- ↑ J-H. Franke et al., Proc. SPIE 11517, 1151716 (2020).
- ↑ J. Zimmerman et al., 2016 International Symposium on Extreme Ultraviolet Lithography, Hiroshima, Japan, 2016-10-24.
File history
Click on a date/time to view the file as it appeared at that time.
Date/Time | Thumbnail | Dimensions | User | Comment | |
---|---|---|---|---|---|
current | 03:35, 26 January 2021 | 480 × 288 (9 KB) | Guiding light (talk | contribs) | Uploaded own work with UploadWizard |
You cannot overwrite this file.
File usage on Commons
There are no pages that use this file.
Metadata
This file contains additional information such as Exif metadata which may have been added by the digital camera, scanner, or software program used to create or digitize it. If the file has been modified from its original state, some details such as the timestamp may not fully reflect those of the original file. The timestamp is only as accurate as the clock in the camera, and it may be completely wrong.
Horizontal resolution | 37.79 dpc |
---|---|
Vertical resolution | 37.79 dpc |