File:Low-height NAND cell.png
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Summary
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English: Some critical layers in a 7nm NAND logic gate cell is shown, using 6.5 tracks. The local regularity and reduced cell height avoid SAQP cut locations inside the cell (only one cut mask for the cell boundaries) and only require one cut mask per SADP layer within the cell, or else only require LELE (two mask exposures). Red: gate (42 nm pitch); Blue: local interconnect; Outline: gate contact (>76 nm center-to-center); Green: minimum pitch (32 nm) metal, including power rail; Dashed lines: underlying fins. Ref.: S. M. Y. Sherazi et al., Proc. SPIE 10148, 101480& (2017). |
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| Date | |||
| Source | Excel drawing | ||
| Author | Guiding light | ||
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-06-11 13:40 | 288×498× (4461 bytes) | Guiding light | Underlying fins added |
| 2017-06-11 02:38 | 288×498× (3797 bytes) | Guiding light | |
| 2017-06-11 02:17 | 288×494× (3669 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 02:11, 15 July 2017 | | 288 × 498 (4 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 02:11, 15 July 2017 |  | 288 × 498 (4 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-06-11 02:38:47 by Guiding light | |
| 02:11, 15 July 2017 |  | 288 × 494 (4 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-06-11 02:17:55 by Guiding light | |
| 04:45, 12 July 2017 |  | 288 × 498 (4 KB) | Daylen (talk | contribs) | Transferred from en.wikipedia |
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