File:Large pitch H-V asymmetry.png

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Large_pitch_H-V_asymmetry.png (481 × 288 pixels, file size: 6 KB, MIME type: image/png)

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Summary

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Description Even for pitches as large as 40 nm, there is still significant H-V bias asymmetry, due to the off-axis nature of EUV optics. Conventional illumination with 0.25 NA. The slit position is at center. Ref.: T-S Eom et al., Proc. SPIE 7271, 727115 (2009).
Date
Source Excel
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2016-12-20 14:11:22 481 × 288 Guiding light slit position indicated = center
2016-12-20 12:50:11 481 × 288 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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current15:53, 2 April 2020Thumbnail for version as of 15:53, 2 April 2020481 × 288 (6 KB)Hippymoose17 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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