File:Horizontal-vertical difference for 22 nm and 27 nm lines by EUV.png
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Horizontal-vertical_difference_for_22_nm_and_27_nm_lines_by_EUV.png (526 × 448 pixels, file size: 91 KB, MIME type: image/png)
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[edit]DescriptionHorizontal-vertical difference for 22 nm and 27 nm lines by EUV.png |
English: The horizontal vs. vertical CD difference for 27 nm dense lines, 27 nm isolated lines and 22 nm isolated lines are shown for a conventional EUV illumination (0.33 NA, 0.9/0.2). The asymmetry between horizontal and vertical lines depends linearly on absorber height, so there is sensitivity to absorber height variation, but there is no "best" absorber height. Ref.: N. Davydova et al., Proc. SPIE 8886, 88860A (2013). |
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This presentation was created with Microsoft PowerPoint. |
Author | Guiding light |
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[edit]Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
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[edit]The original description page was here. All following user names refer to en.wikipedia.
Date/Time | Dimensions | User | Comment |
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2017-01-18 01:41:26 | 526 × 448 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 16:24, 20 August 2019 | 526 × 448 (91 KB) | Dave louis john (talk | contribs) | Transferred from en.wikipedia (MTC!) (1.1.0) |
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Horizontal resolution | 37.79 dpc |
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Vertical resolution | 37.79 dpc |