File:Fundamental EUV pattern shift vs. focus.png

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Fundamental_EUV_pattern_shift_vs._focus.png (456 × 434 pixels, file size: 26 KB, MIME type: image/png)

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Description
English: A 17 nm space width on 100 nm pitch shows fundamental pattern shift even at the central angle of 6 degrees, at the EUV slit edge. 0.33 NA. Ref.: X. Liu et al., Proc. SPIE vol. 9048, 90480Q (2014).
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Source Graphic editor
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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2017-05-19 13:17:40 456 × 434 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current16:26, 20 August 2019Thumbnail for version as of 16:26, 20 August 2019456 × 434 (26 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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