File:Fraunhofer IPMS Mikroscanner auf einem BSOI Wafer.jpg
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| Description |
Deutsch: Mit dem Fraunhofer AME75-Prozess fertig prozessierte Mikroscanner auf einem Wafer,
a) bei designspezifischer Strukturierung ausgehend von einem blanken BSOI-Wafer. b) bei Fertigung mit dem VarioS®-Baukastensystem basierend auf vorprozessierten BSOI-Wafern. |
| Date | |
| Source | Own work |
| Author | Positiveimpact |
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I, the copyright holder of this work, hereby publish it under the following license:
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 09:25, 6 June 2011 | | 1,209 × 604 (178 KB) | Positiveimpact (talk | contribs) |
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