File:EUV illumination shapes.png

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Summary

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Description Basic illumination shapes. These are applicable to both EUV and DUV lithography systems.
Date
Source PowerPoint
Author Guiding light

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-07-01 06:48:25 929 × 661 Guiding light
2017-07-01 06:24:29 1190 × 658 Guiding light
2017-06-22 06:20:29 782 × 300 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current15:56, 2 April 2020Thumbnail for version as of 15:56, 2 April 2020929 × 661 (44 KB)Hippymoose17 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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