File:EUV TPT vs hp.png
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EUV_TPT_vs_hp.png (481 × 289 pixels, file size: 7 KB, MIME type: image/png)
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| Description |
English: EUV throughput decreases with shrinking half-pitch. This is the combined effect of reduced NILS, more shot noise, and larger angles of reflection, as feature pitch is reduced. Increasing the number of exposures allows return to larger half-pitch, which increases throughput; however, the additional exposures effectively reduces the throughput dramatically once again. Source:https://www.semiwiki.com/forum/content/6723-spie-2017-asml-interview-presentations.html, Figure 4. Quasar illumination is used. |
| Date | |
| Source | Graphic editor |
| Author | Guiding light |
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-05-27 02:18:19 | 481 × 289 | Guiding light | |
| 2017-05-27 01:26:54 | 480 × 289 | Guiding light | |
| 2017-04-20 05:02:39 | 936 × 420 | Guiding light | Updated figure |
| 2017-01-06 12:47:12 | 894 × 442 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 21:30, 20 August 2019 | | 481 × 289 (7 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 21:30, 20 August 2019 |  | 480 × 289 (8 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-27 01:26:54 by Guiding light | |
| 21:30, 20 August 2019 |  | 936 × 420 (288 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-04-20 05:02:39 by Guiding light | |
| 21:30, 20 August 2019 |  | 894 × 442 (42 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-01-06 12:47:12 by Guiding light | |
| 16:31, 20 August 2019 |  | 481 × 289 (7 KB) | Dave louis john (talk | contribs) | Transferred from en.wikipedia (MTC!) (1.1.0) |
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