File:EUV SMO effectiveness vs. pitch.png

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EUV_SMO_effectiveness_vs._pitch.png (481 × 290 pixels, file size: 11 KB, MIME type: image/png)

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Description The EUV SMO performance based on normalized image log-slope (NILS) optimization for 32 nm pitch logic metal layout and through-pitch structures is only successful for 34-38 nm pitch (NILS = 2.0-2.15), while not satisfactory for other pitches, even though the target was 32 nm. Ref.: R-H. Kim et al., Proc. SPIE 9771, 97716R (2016).
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Source Excel
Author Guiding light
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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2017-05-27 06:47:39 481 × 290 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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current15:53, 2 April 2020Thumbnail for version as of 15:53, 2 April 2020481 × 290 (11 KB)Hippymoose17 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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