File:EUV SMO Performance Across Pitch.png

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EUV_SMO_Performance_Across_Pitch.png (610 × 399 pixels, file size: 158 KB, MIME type: image/png)

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Description
English: EUV SMO performance across pitch, as indicated by NILS (normalized image log slope). The performance is maximized for 36 nm pitch but degrades as pitch increases toward 48 nm. Ref.: R-H. Kim et al., Proc. SPIE vol. 9776, 97761R (2016).
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Source Graphic editor
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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2017-05-19 14:04:03 610 × 399 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current16:29, 20 August 2019Thumbnail for version as of 16:29, 20 August 2019610 × 399 (158 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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