File:Dipole rotation across ring-field.png

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Dipole_rotation_across_ring-field.png (481 × 286 pixels, file size: 32 KB, MIME type: image/png)

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Summary

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Description Inset: The orientation of the dipole illumination (40 nm pitch, 0.33 NA) is rotated by 18 degrees from the center to the edge of the arc-shaped ring field.refA. V. Pret et al., Proc. SPIE 10809, 10809A (2018).</ref> The hollow dots indicate the intended orientation. Since the new rotated locations (solid dots) include those which do not help the image but in fact only contribute background light, the image is degraded.refThe Need for Low Pupil Fill in EUV Lithography (SemiWiki)</ref>refThe Need for Low Pupil Fill in EUV Lithography</ref>
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Source Excel drawing
Author Guiding light
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2020-08-05 15:01:36 481 × 286 Guiding light
2020-07-07 03:54:36 1114 × 372 Guiding light
2020-07-07 01:25:48 1112 × 173 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current01:01, 13 August 2020Thumbnail for version as of 01:01, 13 August 2020481 × 286 (32 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
01:00, 13 August 2020Thumbnail for version as of 01:00, 13 August 20201,114 × 372 (105 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2020-07-07 03:54:36 by Guiding light
01:00, 13 August 2020Thumbnail for version as of 01:00, 13 August 20201,112 × 173 (56 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2020-07-07 01:25:48 by Guiding light
20:23, 11 August 2020Thumbnail for version as of 20:23, 11 August 2020481 × 286 (32 KB)MrTransfer (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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