File:B-pab-plasmareactorlpplasmaactivation.png
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B-pab-plasmareactorlpplasmaactivation.png (689 × 404 pixels, file size: 13 KB, MIME type: image/png)
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DescriptionB-pab-plasmareactorlpplasmaactivation.png |
English: Scheme of a plasma reactor for low pressure plasma activated bonding |
Source | D. Wünsch and B. Müller and M. Wiemer and T. Gessner and H. Mischke, Aktivierung mittels Niederdruckplasma zur Herstellung von Si-Verbunden im Niedertemperatur-Bereich und deren Charakterisierung mittels Mikro-Chevron-Test (2010) |
Author | Fraunhofer ENAS, D. Neumann |
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This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license. Attribution: Fraunhofer ENAS
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 08:57, 11 April 2011 | 689 × 404 (13 KB) | Enaswiki (talk | contribs) | Improved plasma area | |
11:43, 10 April 2011 | 689 × 404 (13 KB) | Enaswiki (talk | contribs) | {{Information |Description ={{en|1=Scheme of a plasma reactor for low pressure plasma activated bonding}} |Source ={{own}} |Author =Enaswiki |Date = |Permission ={{cc-by-sa-3.0-de|Fraunhofer ENAS}} |other |
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