File:B-pab-dielectricbarrierdischarge.svg

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DescriptionB-pab-dielectricbarrierdischarge.svg	English: Scheme of dielectric barrier discharge
Source	D. Wünsch and M. Wiemer and M. Gabriel and T. Gessner, Low temperature wafer bonding for microsystems using dielectric barrer discharge (2010)
Author	Fraunhofer ENAS, D. Neumann
Permission (Reusing this file)	This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license. Attribution: Fraunhofer ENAS You are free: to share – to copy, distribute and transmit the work to remix – to adapt the work Under the following conditions: attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use. share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original. CC BY-SA 3.0 truetrue

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current	09:23, 30 March 2011		798 × 288 (12 KB)	Enaswiki (talk \| contribs)	{{Information \|Description ={{en\|1=Scheme of dielectric barrier discharge}} \|Source =D. Wünsch and M. Wiemer and M. Gabriel and T. Gessner, Low temperature wafer bonding for microsystems using dielectric barrer discharge (2010) \|Author

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