File:Aerial image of dense lines vs. half-pitch (EUV).png

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Aerial_image_of_dense_lines_vs._half-pitch_(EUV).png(672 × 430 pixels, file size: 18 KB, MIME type: image/png)

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Summary

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Description
English: The aerial image of dense lines by EUV is shown for different half-pitches, for ideal image conditions, similar to those used for interference lithography.
Other information
The pattern is calculated from the well-known two-beam interference effect, as cited in for example, D. S. Hobbs et al., Proc. SPIE Vol. 3879, p. 124-135 (1999).
Date
Source

Excel

Previously published: N/A
Author Guiding light

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2013-02-19 14:09 672×430× (18889 bytes) Guiding light Intensity (dose) in log scale.
2012-11-01 15:06 674×430× (19865 bytes) Guiding light Curves showing 28 nm to 7 nm hp.
2012-10-31 16:45 674×430× (18932 bytes) Guiding light removed 5 nm hp and 40 nm hp curves for better visualization of 20 nm to 7 nm.
2012-06-19 13:31 619×430× (18636 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

File history

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Date/TimeThumbnailDimensionsUserComment
current01:14, 26 April 2015Thumbnail for version as of 01:14, 26 April 2015672 × 430 (18 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
01:14, 26 April 2015Thumbnail for version as of 01:14, 26 April 2015674 × 430 (19 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-11-01 15:06:37 by Guiding light
01:14, 26 April 2015Thumbnail for version as of 01:14, 26 April 2015674 × 430 (18 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-10-31 16:45:05 by Guiding light
01:14, 26 April 2015Thumbnail for version as of 01:14, 26 April 2015619 × 430 (18 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2012-06-19 13:31:55 by Guiding light
15:18, 25 April 2015Thumbnail for version as of 15:18, 25 April 2015672 × 430 (18 KB)Mx. Granger (talk | contribs)Transferred from en.wikipedia

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