File:14 nm half-pitch multipatterning.png

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Description
English: Shows a patterning flow for 14 nm half-pitch: (a) self-aligned quadruple patterning with sidewall spacers (orange); (b) first cut with 40 nm half-pitch line exposures (green); (c) second cut with 40 nm half-pitch hole exposures (red); (d) third cut with 40 nm half-pitch holes exposuress (blue).
Date
Source Excel drawing
Author Guiding light

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Attribution: Guiding light at English Wikipedia
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2014-08-31 04:38 910×375× (23955 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current13:50, 8 September 2014Thumbnail for version as of 13:50, 8 September 2014910 × 375 (23 KB)Chess (talk | contribs)Transferred from en.wikipedia

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